SPV-200 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.
SPV-200 Vacuum plasma cleaning machine
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-200 Vacuum plasma cleaning machine
Industry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: packaging, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-200 Vacuum plasma cleaning machine
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| power | 0~1000W | 0~2000W | |
| frequency | 13.56MHz | 40KHz | |
| vacuum system | · multi cell pump
| Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| · Material
| Aluminum alloy (customizable stainless steel chamber) | ||
| thickness | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 600×600×600mm（W×H×D） | ||
| Effective size of electrode plate | 575×510mm（W×D） | ||
| Available space spacing | 34mm | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (aluminum, wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas gas circuit | Standard two channels, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride) | ||
| control system | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| · Other Parameter
| boundary dimension | 1050×1750×1050mm（寬×高×深） | |
| weight | 350KG | ||
| Device Appearance Color | silver gray | ||
Factory specifications:
| Factory specifications | |
| Ac power specification
| Power supply：AC380V，50/60Hz，5wire，50A |
| Factory exhaust
| Flow：2.0 m3/min |
| Gas requirements for plant work
| Flow：1~10 L/min Pressure：3~7 kg/cm2 Pipe diameter：6×4 mm Texture：PU pipe Purity：More than 99.99% |
| Factory compressed air requirements
| Flow：1~10 L/min Pressure：3~7 kg/cm2 Pipe diameter：8×5 mm Texture：PU pipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft3 |
2.3 General Requirements
| General requirements | |
| Risk identification | High pressure hazard identification
|
| Service environment | temperature：15~30℃ humidity：30~70% |
| Other matters needing attention | No combustible gases, corrosive gases, explosions or reactive dust Gas cylinders need to be fixed |
| Configuration list | |||||
| Serial Number | Name | description | unit | quantity | |
| 1 | Main engine | boundary dimension：1050×1750×1050mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber
inside dimension 450×450×500mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| frequency：13.56MHz； Power： 0~1000W Equipped with automatic vacuum capacitor matching machine | frequency：40KHz； 0~2000W;
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | Touch screen | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | Flowmeter | · British wawick brand,Argon,Oxygen
| Pc | 2 | |
| 7 | Vacuum pump | Roots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h) | Pc | 1 | |
| 8 | Vacuum gauge | · INFICON
| Pc | 1 | |
| 9 | Specification | Vacuum plasma cleaning machine spv-200 operation manual | Pc | 1 | |
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